Defect investigation in boron implanted silicon by means of temperature dependent RBS and optical near-edge absorption

✍ Scribed by E. Wendler; K. Gärtner; W. Wesch; U. Zammit; K.N. Madhusoodanan

• Book ID: 113285877
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 530 KB
• Volume: 85
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(94)95877-7