7541. Investigation of defects in boron implanted silicon by means of p-n junction: R Lenhard and S Luby,Vacuum,41, 1990, 856–858

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 293 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91609-r