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Defect formation in amorphous silicon doping superlattice films

✍ Scribed by J.David Cohen; John M. Essick; Carol E. Michelson; James P. Harbison

Book ID: 118334062
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 191 KB
Volume: 97-98
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(87)90210-9

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