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Defect engineering of p+-junctions by multiple-species ion implantation

✍ Scribed by M.I. Current; M. Inoue; S. Nakashima; N. Ohno; M. Kuribara; Y. Matsunaga; T. Hara; D. Wagner; S. Leung; B. Adibi; G. Lecouras; L.A. Larson; S. Prussin

Book ID: 113283676
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 696 KB
Volume: 74
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95038-7

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