Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask

✍ Scribed by Corman, Thierry; Enoksson, Peter; Stemme, Göran

• Book ID: 127222692
• Publisher: Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 240 KB
• Volume: 8
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/8/2/010