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Deep Ultraviolet Raman Microspectroscopic Characterization of Polishing-Induced Surface Damage in SiC Crystals

โœ Scribed by Nakashima, S.; Kato, T.; Nishizawa, S.; Mitani, T.; Okumura, H.; Yamamoto, T.

Book ID
111964026
Publisher
The Electrochemical Society
Year
2006
Tongue
English
Weight
145 KB
Volume
153
Category
Article
ISSN
0013-4651

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