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Deep level transient spectroscopy assessment of silicon contamination in AlGaAs layers grown by metalorganic vapor phase epitaxy

✍ Scribed by E. Calleja; F. Sanchez; E. Muñoz; P. Gibart; A. Powell; J. S. Roberts

Book ID: 112812600
Publisher: Springer US
Year: 1995
Tongue: English
Weight: 552 KB
Volume: 24
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02652976

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