Deep etching of epitaxial gallium nitride film by multiwavelength excitation process using F2and KrF excimer lasers

✍ Scribed by K. Obata; K. Sugioka; K. Midorikawa; T. Inamura; H. Takai

• Book ID: 106019998
• Publisher: Springer
• Year: 2005
• Tongue: English
• Weight: 448 KB
• Volume: 82
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-005-3409-8