Decrease in the etch rate of polymers in the oxygen afterglow with increasing gas flow rate
โ Scribed by N. R. Lerner; T. Wydeven
- Publisher
- John Wiley and Sons
- Year
- 1988
- Tongue
- English
- Weight
- 325 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0021-8995
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