Deconvolution methods applied to sputter depth profiles at interfaces

✍ Scribed by C. Palacio; J.M. Martinez-Duart

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 362 KB
• Volume: 105
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(83)90327-9