D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks I: Deposition conditions and optical properties of the films

✍ Scribed by V. Orlinov; B. Goranchev; G. Sarov; V. Tsaneva

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 388 KB
• Volume: 67
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(80)90296-5