Dc plasma-enhanced chemical vapour deposition growth of carbon nanotubes and nanofibres:in situspectroscopy and plasma current dependence
✍ Scribed by M. Jönsson; O.A. Nerushev; E.E.B. Campbell
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 644 KB
- Volume
- 88
- Category
- Article
- ISSN
- 1432-0630
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Plasma-enhanced chemical vapor deposition (PECVD) was used to grow Fe-catalyzed carbon nanotubes (CNTs). The nanotubes had a uniform diameter in the range of about 10-20 nm. A base growth mode was responsible for the CNTs growth using a mixture of H 2 (60 sccm) and C 2 H 2 (15 sccm). For a mixture o
## Abstract Carbon nanotubes (CNTs) have been grown aligned with the directions of electric fields in a DC plasma‐enhanced (DC PE) CVD process. The CNTs can be grown at various predefined angles with respect to the substrate. It is shown that the local electric field, even at the very surface of th