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Modeling catalyst nucleation for carbon nanotube growth by chemical-vapor and plasma-enhanced chemical-vapor deposition methods

✍ Scribed by Yaser Abdi; Shamsoddin Mohajerzadeh; Arzi Ezatollah


Publisher
Springer Netherlands
Year
2009
Tongue
English
Weight
499 KB
Volume
12
Category
Article
ISSN
1388-0764

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Plasma-enhanced chemical vapor deposition (PECVD) was used to grow Fe-catalyzed carbon nanotubes (CNTs). The nanotubes had a uniform diameter in the range of about 10-20 nm. A base growth mode was responsible for the CNTs growth using a mixture of H 2 (60 sccm) and C 2 H 2 (15 sccm). For a mixture o