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dc bias-sputtered aluminium films: A G Blachman,J Vac Sci Technol, 10 (1), Jan/Feb 1973, 299–302

Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 182 KB
Volume: 23
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(73)92194-5

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