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Observations of sputtered thin film growth: D M Sherman et al, (Proc 19th Nat Symp Am Vac Soc) J Vac Sci Technol, 10 (1), Jan/Feb 1973, 155–159


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
182 KB
Volume
23
Category
Article
ISSN
0042-207X

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