✦ LIBER ✦

Damping of piezoresistive silicon accelerometers

✍ Scribed by Thomas Tschan; Nico de Rooij; Alex Bezinge

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Analysis of electrostatic-damped piezore

✍ S. Marco; J. Samitier; O. Ruiz; A. Herms; J.R. Morante 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 508 KB

Fabrication and characterization of high

✍ Yuebin Ning; Yan Loke; Graham McKinnon 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 689 KB

Cross-axis sensitivity reduction of a si

✍ A. Ravi Sankar; S. Das; S. K. Lahiri 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 332 KB

Miniaturization limits of piezoresistive

✍ Manuel Engesser; Axel R. Franke; Matthias Maute; Daniel C. Meisel; Jan G. Korvin 📂 Article 📅 2009 🏛 Springer-Verlag 🌐 English ⚖ 806 KB

Characterization and modelling of silico

✍ Thomas Tschan; Nico de Rooij; Alex Bezinge; Ste´phane Ansermet; Jo¨rg Berthoud 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 963 KB

CMOS compatible bulk micromachined silic

✍ S. Kal; S. Das; D.K. Maurya; K. Biswas; A. Ravi Sankar; S.K. Lahiri 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 297 KB