Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source

✍ Scribed by Barkusky, Frank; Bayer, Armin; Döring, Stefan; Grossmann, Peter; Mann, Klaus

• Book ID: 115412890
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 313 KB
• Volume: 18
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.18.004346