✦ LIBER ✦
Ablation of polymers by focused EUV radiation from a table-top laser-produced plasma source
✍ Scribed by Frank Barkusky; Armin Bayer; Klaus Mann
- Publisher
- Springer
- Year
- 2011
- Tongue
- English
- Weight
- 785 KB
- Volume
- 105
- Category
- Article
- ISSN
- 1432-0630
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