Damage removal and boron diffusion during solid phase epitaxial growth of SiGe alloy layers

✍ Scribed by L.-F. Zou; S.E. Acosta-Ortiz; LuXin Zou; R.E. Luna; G.A. Perez-Herrera; L.E. Regalado

• Book ID: 114171104
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 141 KB
• Volume: 152
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00025-7