Enhanced diffusion from interstitial trapping during solid-phase-epitaxial growth of silicon alloys

✍ Scribed by S.J. Pennycook; J. Narayan; O.W. Holland

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 816 KB
• Volume: 70
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(84)90321-x