Damage profiles in as-implanted 〈100〉 Si crystals: strain by X-ray diffractometry versus interstitials by RBS-channeling

✍ Scribed by R. Nipoti; M. Servidori; M. Bianconi; S. Milita

• Book ID: 114168395
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 427 KB
• Volume: 120
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00480-6