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Damage induced instability in beam bending

✍ Scribed by Per-Olof Boström


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
613 KB
Volume
11
Category
Article
ISSN
0020-7462

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Electron beam induced damage of silicon
✍ D.J. Paul; J.M. Ryan; M. Pepper; A.N. Broers; T.E. Whall; J.M. Fernández; B.A. J 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 304 KB

The damage to modulation-doped pseudomorphic SiGe channels was investigated for a typical 40 keV electron beam lithography resist technique and also a high resolution 300 keV direct write SiO2 patterning technique. Annealing studies on the irradiated samples were also performed. Results show that th