𝔖 Bobbio Scriptorium

✦ LIBER ✦

Damage effects in dry etching : S. J. Fonash. Solid St. Technol. 201 (April 1985)

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 125 KB
Volume: 26
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(86)90594-9

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Advances in dry etching processes—a revi

Advances in dry etching processes—a review : S. J. Fonash. Solid St. Technol. 150 (January 1985)

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 118 KB

Dry etching induced damage in Si and GaA

Dry etching induced damage in Si and GaAs : S. W. Pang. Solid St. Technol. 249 (April 1984)

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 130 KB