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Damage buildup and removal in Ca-ion-implanted GaN

✍ Scribed by C. Liu; M. Schreck; A. Wenzel; B. Mensching; B. Rauschenbach

Book ID: 106023019
Publisher: Springer
Year: 2000
Tongue: English
Weight: 175 KB
Volume: 70
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390050010

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