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Ca and O ion implantation doping of GaN

✍ Scribed by J. C. Zolper; R. G. Wilson; S. J. Pearton; R. A. Stall

Book ID: 126073008
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 285 KB
Volume: 68
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.115634

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