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Damage accumulation during 11B+, 12C+ and 14N+ implantations in Si

โœ Scribed by H. Boudinov; J.P. de Souza


Book ID
114168672
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
533 KB
Volume
122
Category
Article
ISSN
0168-583X

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