CVD diamond coating for erosion protection at elevated temperatures
β Scribed by Vesselin Shanov; Raj N. Singh; Widen Tabakoff
- Book ID
- 111786176
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 389 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1059-9495
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## Chemical vapour deposition of Si3N 4 by pyrolysis (1200-1275Β°C) of tetramethylsilane-ammonia-hydrogen mixtures (N:Si = 10) was used to protect reaction-bonded silicon nitride substrates against internal oxidation at 1000-1350 Β°C. The results reveal the existence of a critical thickness (6 gm)