C–V characteristics of epitaxial germanium metal–oxide–semiconductor capacitor on GaAs substrate with ALD Al2O3 dielectric

✍ Scribed by Shih Hsuan Tang; Chien I. Kuo; Hai Dang Trinh; Mantu Hudait; Edward Yi Chang; Ching Yi Hsu; Yung Hsuan Su; Guang-Li Luo; Hong Quan Nguyen

• Book ID: 113797968
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 619 KB
• Volume: 97
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.03.014