Customized silicon cantilevers for Casimir force experiments using focused ion beam milling

✍ Scribed by Castillo-Garza, R; Chang, Chia-Cheng; Yan, Dong; Mohideen, U

• Book ID: 120628521
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 562 KB
• Volume: 161
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/161/1/012005