Cu/Si/Cu multilayer structures for Ohmic contact on n-type 4H-SiC substrates

✍ Scribed by Cho, N.I.; Choi, Y.; Noh, S.J.

• Book ID: 122992589
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 377 KB
• Volume: 13
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2003.12.027