✦ LIBER ✦

Cu(Ge) alloy films with zirconium addition on barrierless Si for excellent property improvement

✍ Scribed by Liu, B; Lin, L W; Ren, D; Zhang, Y P; Jiao, G H; Xu, K W

Book ID: 125854692
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 965 KB
Volume: 46
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/46/15/155305

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Property improvement of Cu–Zr alloy film

Property improvement of Cu–Zr alloy films with ruthenium addition for Cu metallization

✍ Ying Wang; Fei Cao; Mi-lin Zhang; Tao Zhang 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 798 KB

Films of Cu-Ru-Zr and Cu-Zr were deposited on SiO 2 /Si substrates by magnetron sputtering. Samples were subsequently annealed at temperatures of up to 500 °C for 1 h and analyzed by four-point probe measurement, X-ray diffraction (XRD), transmission electron microscopy (TEM), X-ray photoelectron sp

Improved soft magnetic properties and th

Improved soft magnetic properties and thermal stability for Fe 82·65 Cu 1·35 Si 2 B 14 alloys with Nb, Zr, Ta or Co addition

✍ Liu, Z W; Li, Y M; Wang, J; Zhong, X C; Yu, H Y; Zeng, D C 📂 Article 📅 2012 🏛 Institute of Materials, Minerals and Mining 🌐 English ⚖ 321 KB