Crystallization of n-doped amorphous silicon PECVD films: comparison between SPC and RTA methods

✍ Scribed by J.F Pierson; K.S Kim; J Jolly; D Mencaraglia

• Book ID: 117144441
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 145 KB
• Volume: 270
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(00)00063-6