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Crystallization method providing composition autocontrol in situ (CAM-S)

✍ Scribed by J.J. Venkrbec; Z. Čečil; V. Rosická; J. Kohout


Book ID
103413561
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
617 KB
Volume
213
Category
Article
ISSN
0040-6031

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## Abstract This paper reports on the in situ determination of the Al‐content in Al~__x__~ Ga~1–__x__~ N layers deposited by MOVPE on sapphire and silicon substrates by means of optical reflectance. The accuracy of the conventional in situ method which utilizes the dependence of the refractive inde