Crystallization induced by thermal annealing with millisecond pulses in silicon-on-insulator films implanted with high doses of hydrogen ions

✍ Scribed by I. E. Tyschenko, V. A. Volodin, M. Voelskow, A. G. Cherkov, V. P. Popov

• Book ID: 120808752
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 379 KB
• Volume: 47
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/S1063782613050229