Crystalline ZnO/SrTiO3transparent field effect transistor

✍ Scribed by Bellingeri, E. ;Pallecchi, I. ;Pellegrino, L. ;Canu, G. ;Biasotti, M. ;Vignolo, M. ;Siri, A. S. ;Marré, D.

• Book ID: 105364890
• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 322 KB
• Volume: 205
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200778900

✦ Synopsis

Abstract

We fabricated field effect transistors which are transparent at visible wavelength, by realizing epitaxial ZnO/SrTiO~3~ heterostructures. High crystalline quality ZnO layers were grown by pulsed laser deposition on 110 oriented strontium titanate single crystals. By conventional photolithographic techniques we realized micrometric sized devices in both bottom‐gate stacked layers geometry and planar side‐gate configuration. Our transistors show 80% light transmittance, on/off ratios up to 10^6^ and field effect mobilities up to 30 cm^2^/Vs at 77 K. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)