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Crystalline structure of YSZ thin films deposited on Si(111) substrate by chemical vapor deposition

✍ Scribed by Sang-Chul Hwang; Hee-Gyoun Lee; Hyung-Shik Shin

Book ID: 110643828
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 434 KB
Volume: 15
Category: Article
ISSN: 0256-1115
DOI: 10.1007/bf02707078

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