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Crystalline quality of Si epilayers influenced by Sb doping

✍ Scribed by Xuekun Lu; Zuimin Jiang; Damin Huang; Haijun Zhu; Xiangjiu Zhang; Xun Wang

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 365 KB
Volume: 158
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)00441-6

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