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Crystalline orientation control for aluminum nitride films prepared by ion-beam-assisted technology

✍ Scribed by K. Ogata; Y. Andoh; S. Sakai; F. Fujimoto


Book ID
113281533
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
295 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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