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Crystal growth of niobium nitride and niobium carbide nitride

✍ Scribed by A.Nørlund Christensen; C. Rusche

Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
521 KB
Volume
44
Category
Article
ISSN
0022-0248

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Superconducting niobium and niobium nitr
Superconducting niobium and niobium nitride processes for medium-scale integration applications
✍ M. Radparvar 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 691 KB

A 10 layer circuit process is described that is based on relatively reproducible, high quality, all-niobium (Nb) and niobium nitride (NbN) Josephson junctions. The junctions are fabricated from in-situ trilayer films of S/M-MOx/S using a selective niobium etching process (SNEP), where S is supercond