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Crossed planar X-ray lenses made from nickel for X-ray micro focusing and imaging applications

✍ Scribed by V. Nazmov; E. Reznikova; A. Last; J. Mohr; V. Saile; M. DiMichiel; J. Göttert

Book ID
108223320
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
440 KB
Volume
582
Category
Article
ISSN
0168-9002

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✍ Reznikova, E. ;Weitkamp, T. ;Nazmov, V. ;Last, A. ;Simon, M. ;Saile, V. 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 574 KB

## Abstract Planar X‐ray refractive lenses with parabolic surface profile, and in crossed geometry to provide 2D focusing, are fabricated from SU‐8 polymer using the LIGA process and deep X‐ray lithography technology. A transmission X‐ray microscope (TXM) using a condenser and an objective lens bas