✦ LIBER ✦

Cross-section TEM for examinations of selective tungsten CVD for via hole filling

✍ Scribed by W. Grünewald; S. E. Schulz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Selective tungsten CVD on sputtered tung

✍ S.E. Schulz; B. Hintze; T. Gessner; H. Wolf; W. Gruenewald 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 1001 KB

Application of selective CVD tungsten fo

✍ S. Rang; R. Chow; R. H. Wilson; B. Gorowitz; A. G. Williams 📂 Article 📅 1988 🏛 Springer US 🌐 English ⚖ 597 KB

Selection of the spinneret hole form for

✍ A. A. Aver'yanov; A. A. Dubynin; G. D. Karpova 📂 Article 📅 1983 🏛 Springer US 🌐 English ⚖ 250 KB