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Cross-linked Polymer Replica of a Nanoimprint Mold at 30 nm Half-pitch

✍ Scribed by Ge, Haixiong; Wu, Wei; Li, Zhiyong; Jung, Gun-Young; Olynick, Deirdre; Chen, Yanfeng; Liddle, J. Alexander; Wang, Shih-Yuan; Williams, R. Stanley

Book ID: 120469731
Publisher: American Chemical Society
Year: 2005
Tongue: English
Weight: 251 KB
Volume: 5
Category: Article
ISSN: 1530-6984
DOI: 10.1021/nl048618k

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