Cross-check measurement of electrical properties of semi-insulating GaAs

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 288 KB
• Volume: 9
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(96)80192-x

✦ Synopsis

Cross-check Measurement of Electrical Properties of

Semi-insulating GaAs

SI GaAs is widely applied for many fields such as cellular phones, fibre communication systems, satellite broadcasting tuners. The SI property is necessary for high performance. The electrical properties of semi-insulating GaAs are determined by carbon concentrations and EL2 concentrations, and are key parameters for the fabrication of ion-implanted type MESFETs

for these applications. It is therefore very important to measure the electrical properties as accurately as possible without large deviation among various manufacturers.