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Crack free monolithic nitride vertical-cavity surface-emitting laser structures and pillar microcavities

✍ Scribed by Lohmeyer, Henning ;Sebald, Kathrin ;Kruse, Carsten ;Kröger, Roland ;Gutowski, Jürgen ;Hommel, Detlef ;Wiersig, Jan ;Jahnke, Frank

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
348 KB
Volume
203
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

We report on the successful fabrication and optical investigation of monolithicly grown GaN based vertical‐cavity surface‐emitting laser structures featuring quality factors of 250. Short‐period AlN/InGaN superlattices are used for the low‐index layers of the distributed Bragg reflectors. Pillar microcavities are realized by focused‐ion‐beam etching. Micro‐photoluminescence measurements reveal the longitudinal and transversal mode spectra of the cavities in good agreement with theoretical calculations based on a vectorial transfer matrix method. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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