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Correlation of surface roughness with edge roughness in PMMA resist

✍ Scribed by Shazia Yasin; M.N. Khalid; D.G. Hasko; S. Sarfraz

Book ID
104050276
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
483 KB
Volume
78-79
Category
Article
ISSN
0167-9317

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