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Correlation of surface morphology and chemical state of Si surfaces to electrical properties

✍ Scribed by P.O. Hahn; M. Grundner; A. Schnegg; H. Jacob

Book ID
103615300
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
995 KB
Volume
39
Category
Article
ISSN
0169-4332

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Correlation between optical properties o
Correlation between optical properties of MBE films of AlN and morphology of their surface
✍ Svitasheva, S. N. ;Mansurov, V. G. ;Zhuravlev, K. S. ;Nikitin, A. Yu. ;Sheglov, πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 720 KB

## Abstract In this work we revealed correlation between presence of surface defects and peculiarities in ellipsometric spectra and hence in optical properties of AlN films grown by ammonia MBE technique. We propose to use this fact for the fast and non‐destructive checking of film quality. Princip