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Correlation between the photoluminescence and different types of Si nano-clusters in amorphous silicon

โœ Scribed by T.V. Torchynska; A.L. Quintos Vazquez; G. Polupan; Y. Matsumoto; L. Khomenkova; L. Shcherbyna


Book ID
116671041
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
180 KB
Volume
354
Category
Article
ISSN
0022-3093

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A simple reactive evaporation method is proposed to prepare light-emitting SiO x thin films. Pure silicon is evaporated in a controlled molecular oxygen atmosphere. By changing the pressure in the preparation chamber, x can be varied from 0.7 to 1.85. The samples were annealed in the range 350-1100