Correlation between the cathode erosion, the optical emission and the magnetic field distribution in magnetron sputtering systems

✍ Scribed by Debal, F; Cammarata, F; Wautelet, M; Dauchot, J P; Hecq, M

• Book ID: 121447322
• Publisher: Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 83 KB
• Volume: 31
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/31/8/001