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Correlation between plasma chemistry, microstructure and electronic properties of Si:H thin films prepared with hydrogen dilution

โœ Scribed by Partha Chaudhuri; Debajyoti Das; Partha Pratim Ray; Namita Dutta Gupta; Dhananjoy Roy; Christophe Longeaud


Book ID
116667706
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
293 KB
Volume
338-340
Category
Article
ISSN
0022-3093

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