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Corrections to the collisional sputtering yield

✍ Scribed by Giovanni Falcone; Roger Kelly; Antonino Oliva

Book ID
114168004
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
238 KB
Volume
18
Category
Article
ISSN
0168-583X

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Ion bombardment usually leads to a change in the equilibrium sputtered surface composition of compound semiconductors. This change is matrix dependent. To compensate for this sputter-induced e †ect in quantitative AES, a sputter yield correction factor is usually employed. This factor is based on th